In the study of pulse width broadening, the research group put forward a pulse broadening structure composed of double beam splitter and multiple mirrors.
postato da Eyes123456 il 22/11/2016
Categoria: Economia - tags: technology
Best Burning Laser Pointer

In the study of excimer lithography system laser pulse width widening technology has made new progress: a double beam splitter based on the composition of the mirror and a broad pulse width structure, Related research results have applied for patented invention "based on a double beam splitter component excimer burning laser penpulse broadening device."

In an excimer laser exposure optical system, the lifetime of the optical element determines the service life of the lithographic apparatus and the manufacturing cost of the microelectronic device. And the useful life of the optical element is directly related to the peak power density of the laser beam in the exposure optical system. The lower the peak power density, the longer the service life of the optical element. On the other hand, in order to increase the use efficiency and yield of the exposure optical system, the laser output power needs to be as high as possible. Since the yield of the exposure optical system is mainly proportional to the output power of the laser irrespective of the pulse width of the single pulse, the increase of the 50mw laser pointer output power and the broadening of the output pulse width can not only effectively increase the yield of the exposure optical system, but also effectively reduce The peak power density of the laser beam in the exposure optical system prolongs the service life of the optical element and reduces the manufacturing cost of the microelectronic device.

In the study of pulse width broadening, the research group put forward a pulse broadening structure composed of double beam splitter and multiple mirrors. The existing structure of pulse broadening is usually composed of a single beam splitter and a plurality of mirrors, and the novel structure has the advantages that the laser output pulse waveform can be remarkably improved by further optimizing the splitting ratio of the two spectroscopes to further reduce the laser pulse The instantaneous peak power increases the lifetime of the optical elements in the exposure optical system.

Figure (a) is a structure composed of double pulse width spectroscope and four mirrors based on the schematic (b) procedures for the simulation of 5mw laser pointerpulse laser pulse double pulse width module and single structure spectroscope spectroscopic structure of pulse width broadening module output by on besto.

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